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European pair promise 'single-nanometer accuracy' patterning tool for optics

编译者:petrel发布时间:Oct 16, 2017点击量:3899 来源栏目:光电信息

European pair promise 'single-nanometer accuracy' patterning tool for optics. 11Oct2017 Semiconductor equipment firms SwissLitho and EV Group continue collaboration initiated under European research project. Zurich-based SwissLitho and Austria’s EV Group are working together to bring to market a new nanoimprint lithography (NIL) technique capable of making nanostructured optical components. The collaboration, which builds on earlier research carried out under a €17.6million project fund...

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