您当前的位置: 首页 > 资源详情

European pair promise 'single-nanometer accuracy' patterning tool for optics

编译者:petrel发布时间:2017-10-16点击量:4559 来源栏目:光电信息

European pair promise 'single-nanometer accuracy' patterning tool for optics. 11Oct2017 Semiconductor equipment firms SwissLitho and EV Group continue collaboration initiated under European research project. Zurich-based SwissLitho and Austria’s EV Group are working together to bring to market a new nanoimprint lithography (NIL) technique capable of making nanostructured optical components. The collaboration, which builds on earlier research carried out under a €17.6million project fund...

提供服务:导出本资源

版权所有@2017中国科学院文献情报中心

制作维护:中国科学院文献情报中心信息系统部地址:北京中关村北四环西路33号邮政编号:100190