|
Ultra-precise determination of thicknesses and refractive indices of optically thick dispersive materials by dual-comb spectroscopy
|
|
References . View by: . Article Order . Year . Author . Publication . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] . G. D. Gillen and S. Guha, “Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers,” Appl. Opt. 44(3), 344–347 (2005). [Crossref] . Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] . Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] . K. Vedam and S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 28(14), 2691–2694 (1989). [Crossref] . A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] . A. Hirai and H. Matsumoto, “Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer,” Appl. Opt. 45(22), 5614–5620 (2006). [Crossref] . S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] . J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] . S. Schiller, “Spectrometry with frequency combs,” Opt. Lett. 27(9), 766–768 (2002). [Crossref] . F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] . I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] . G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] . I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] . N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011). [Crossref] . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] . I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] . H. H. Li, “Refractive index of silicon and germanium and its wavelength and temperature derivatives,” J. Phys. Chem. Ref. Data 9(3), 561–658 (1980). [Crossref] . L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] . I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] . M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] . A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] . B. Edlén, “The Refractive Index of Air,” Metrologia 2(2), 71–80 (1966). [Crossref] . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] . 2021 (1) . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] 2020 (1) . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] 2019 (2) . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] 2018 (2) . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] 2017 (1) . A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] 2016 (3) . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] 2015 (1) . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] 2014 (1) . Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] 2013 (3) . J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] 2012 (3) . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] 2011 (2) . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011). [Crossref] 2010 (2) . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] 2009 (4) . Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] 2008 (2) . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] 2007 (1) . I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] 2006 (1) . A. Hirai and H. Matsumoto, “Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer,” Appl. Opt. 45(22), 5614–5620 (2006). [Crossref] 2005 (1) . G. D. Gillen and S. Guha, “Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers,” Appl. Opt. 44(3), 344–347 (2005). [Crossref] 2004 (1) . F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] 2003 (1) . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] 2002 (1) . S. Schiller, “Spectrometry with frequency combs,” Opt. Lett. 27(9), 766–768 (2002). [Crossref] 2001 (1) . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] 2000 (1) . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] 1999 (1) . L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] 1998 (1) . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] 1996 (1) . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] 1994 (1) . A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] 1989 (1) . K. Vedam and S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 28(14), 2691–2694 (1989). [Crossref] 1980 (1) . H. H. Li, “Refractive index of silicon and germanium and its wavelength and temperature derivatives,” J. Phys. Chem. Ref. Data 9(3), 561–658 (1980). [Crossref] 1966 (1) . B. Edlén, “The Refractive Index of Air,” Metrologia 2(2), 71–80 (1966). [Crossref] Abbott, D. . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] Abgrall, M. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Ahn, C. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Ahn, H. . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] Angmo, D. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Aoki, M. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Arwin, H. . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] Asahara, A. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Asahi, T. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Bae, J. . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] Balling, P. . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] Baraniuk, R. G. . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] Bendahmane, A. . G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] Bernhardt, B. . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Cha, M. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Chen, Z. . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] Choi, H. J. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Clairon, A. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Coddington, I. . I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] Coppola, G. . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] Coutaz, J.-L. . L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] Dastmalchi, B. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] De Nicola, S. . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] Deschênes, J.-D. . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] Dole?al, M. . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] Dorney, T. D. . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] Duvillaret, L. . L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] Edlén, B. . B. Edlén, “The Refractive Index of Air,” Metrologia 2(2), 71–80 (1966). [Crossref] Eikema, K. S. E. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Eom, T. B. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Ferraro, P. . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] Fischer, B. M. . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] Garet, F. . L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] Genest, J. . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] Gillen, G. D. . G. D. Gillen and S. Guha, “Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers,” Appl. Opt. 44(3), 344–347 (2005). [Crossref] Gohle, C. . F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] Guelachvili, G. . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Guha, S. . G. D. Gillen and S. Guha, “Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers,” Appl. Opt. 44(3), 344–347 (2005). [Crossref] H?nsch, T. W. . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Haruna, M. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Hashimoto, M. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Hingerl, K. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Hirai, A. . Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] A. Hirai and H. Matsumoto, “Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer,” Appl. Opt. 45(22), 5614–5620 (2006). [Crossref] Hiromoto, N. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] H?gner, M. . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] Holzner, S. . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Holzwarth, R. . F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Hong, F.-L. . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Hoogerland, M. D. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Hori, Y. . Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] Hosaka, K. . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Hosako, I. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Hovhannisyan, T. . G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] Hyun, M. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Ideguchi, T. . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Inaba, H. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Iodice, M. . G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] Iwakuni, K. . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Jannin, R. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Jansen, C. . M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] Jansson, R. . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] Jeon, C.-G. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Jin, G. . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] Jin, J. . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] Ju, J. J. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Keilmann, F. . F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] Kim, J. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Kim, J. W. . J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] Kim, J.-A. . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] Kim, M. J. . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] Kim, S. . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] Kim, S. Y. . K. Vedam and S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 28(14), 2691–2694 (1989). [Crossref] Kim, S.-W. . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Kim, Y.-J. . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Koch, M. . M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] Kondo, K. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Krebs, F. C. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Kren, P. . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] Kwon, D. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Laurent, P. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Lee, B. H. . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] Lee, J. . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Lee, K. . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Lee, S. . J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Lemonde, P. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Li, H. H. . H. H. Li, “Refractive index of silicon and germanium and its wavelength and temperature derivatives,” J. Phys. Chem. Ref. Data 9(3), 561–658 (1980). [Crossref] Lim, H. H. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Lin, H. Y. . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] Liu, A.-H. . A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] Madsen, M. V. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Maeng, S. . S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] Manceau, M. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Maruyama, H. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Ma?ika, P. . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] Matsumoto, H. . Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] A. Hirai and H. Matsumoto, “Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer,” Appl. Opt. 45(22), 5614–5620 (2006). [Crossref] Millot, G. . G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] Minoshima, K. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] Mitsuyama, T. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Mittleman, D. M. . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] Moon, H. S. . H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] Moriwaki, A. . A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] Na, J. . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] Na, Y. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Nakajima, Y. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Nenadovic, L. . I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] Newbury, N. . I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] Newbury, N. R. . N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011). [Crossref] I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] Niering, M. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Nishiyama, A. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Norrman, K. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Notermans, R. P. M. J. W. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] O, B. . S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] Oguchi, K. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] Ohmi, M. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Okano, M. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] Okubo, S. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Onae, A. . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Park, J. . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] Picqué, N. . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Pitois, S. . G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] Plawsky, J. L. . A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] Pokasov, P. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Potvin, S. . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] Pupeza, I. . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] Reichert, J. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Rengelink, R. J. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Roy, J. . J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] Salomon, C. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Santarelli, G. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Sasada, H. . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Scheller, M. . M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] Schiller, S. . S. Schiller, “Spectrometry with frequency combs,” Opt. Lett. 27(9), 766–768 (2002). [Crossref] Shin, J. . Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] Sumihara, K. A. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] Swann, W. . I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] Swann, W. C. . I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] Sylvester-Hvid, K. O. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Tajiri, H. . M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] Takeda, M. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Tripathi, S. R. . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Tromholt, T. . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] Udem, Th. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] van der Werf, Y. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Vassen, W. . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Vedam, K. . K. Vedam and S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 28(14), 2691–2694 (1989). [Crossref] Watanabe, S. . K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] Wayner, P. C. . A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] Weitz, M. . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Wilk, R. . I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] Withayachumnankul, W. . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] Yan, M. . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] Ye, J. . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] Yoshida, S. . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] Zhang, C. . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] APL Photonics (1) . A. Moriwaki, M. Okano, and S. Watanabe, “Internal triaxial strain imaging of visibly opaque black rubbers with terahertz polarization spectroscopy,” APL Photonics 2(10), 106101 (2017). [Crossref] Appl. Opt. (8) . G. D. Gillen and S. Guha, “Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers,” Appl. Opt. 44(3), 344–347 (2005). [Crossref] Y. Hori, A. Hirai, K. Minoshima, and H. Matsumoto, “High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass,” Appl. Opt. 48(11), 2045–2050 (2009). [Crossref] Y. Hori, A. Hirai, and K. Minoshima, “Prism-pair interferometer for precise measurement of the refractive index of optical glass by using a spectrum lamp,” Appl. Opt. 53(13), 2793–2801 (2014). [Crossref] K. Vedam and S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 28(14), 2691–2694 (1989). [Crossref] A.-H. Liu, P. C. Wayner, and J. L. Plawsky, “Image scanning ellipsometry for measuring nonuniform film thickness profiles,” Appl. Opt. 33(7), 1223–1229 (1994). [Crossref] G. Coppola, P. Ferraro, M. Iodice, and S. De Nicola, “Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer,” Appl. Opt. 42(19), 3882–3887 (2003). [Crossref] A. Hirai and H. Matsumoto, “Measurement of group refractive index wavelength dependence using a low-coherence tandem interferometer,” Appl. Opt. 45(22), 5614–5620 (2006). [Crossref] L. Duvillaret, F. Garet, and J.-L. Coutaz, “Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy,” Appl. Opt. 38(2), 409–415 (1999). [Crossref] Appl. Phys. Express (1) . S. Okubo, K. Iwakuni, H. Inaba, K. Hosaka, A. Onae, H. Sasada, and F.-L. Hong, “Ultra-broadband dual-comb spectroscopy across 1.0-1.9 ?m,” Appl. Phys. Express 8(8), 082402 (2015). [Crossref] Int. J. Precis. Eng. Manuf. (1) . J. Park, J.-A. Kim, H. Ahn, J. Bae, and J. Jin, “A Review of Thickness Measurements of Thick Transparent Layers Using Optical Interferometry,” Int. J. Precis. Eng. Manuf. 20(3), 463–477 (2019). [Crossref] J. Opt. Soc. Am. A (1) . T. D. Dorney, R. G. Baraniuk, and D. M. Mittleman, “Material parameter estimation with terahertz time-domain spectroscopy,” J. Opt. Soc. Am. A 18(7), 1562–1571 (2001). [Crossref] J. Opt. Soc. Am. B (1) . W. Withayachumnankul, B. M. Fischer, H. Y. Lin, and D. Abbott, “Uncertainty in terahertz time-domain spectroscopy measurement,” J. Opt. Soc. Am. B 25(6), 1059–1072 (2008). [Crossref] J. Phys. Chem. C (1) . M. V. Madsen, K. O. Sylvester-Hvid, B. Dastmalchi, K. Hingerl, K. Norrman, T. Tromholt, M. Manceau, D. Angmo, and F. C. Krebs, “Ellipsometry as a Nondestructive Depth Profiling Tool for Roll-to-Roll Manufactured Flexible Solar Cells,” J. Phys. Chem. C 115(21), 10817–10822 (2011). [Crossref] J. Phys. Chem. Ref. Data (1) . H. H. Li, “Refractive index of silicon and germanium and its wavelength and temperature derivatives,” J. Phys. Chem. Ref. Data 9(3), 561–658 (1980). [Crossref] Jpn. J. Appl. Phys. (1) . S. R. Tripathi, M. Aoki, M. Takeda, T. Asahi, I. Hosako, and N. Hiromoto, “Accurate complex refractive index with standard deviation of ZnTe measured by terahertz time domain spectroscopy,” Jpn. J. Appl. Phys. 52(4R), 042401 (2013). [Crossref] Meas. Sci. Technol. (1) . P. Balling, P. Ma?ika, P. K?en, and M. Dole?al, “Length and refractive index measurement by Fourier transform interferometry and frequency comb spectroscopy,” Meas. Sci. Technol. 23(9), 094001 (2012). [Crossref] Metrologia (1) . B. Edlén, “The Refractive Index of Air,” Metrologia 2(2), 71–80 (1966). [Crossref] Nat. Commun. (1) . Z. Chen, M. Yan, T. W. H?nsch, and N. Picqué, “A phase-stable dual-comb interferometer,” Nat. Commun. 9(1), 3035 (2018). [Crossref] Nat. Photonics (6) . I. Pupeza, C. Zhang, M. H?gner, and J. Ye, “Extreme-ultraviolet frequency combs for precision metrology and attosecond science,” Nat. Photonics 15(3), 175–186 (2021). [Crossref] G. Millot, S. Pitois, M. Yan, T. Hovhannisyan, A. Bendahmane, T. W. H?nsch, and N. Picqué, “Frequency-agile dual-comb spectroscopy,” Nat. Photonics 10(1), 27–30 (2016). [Crossref] I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, “Rapid and precise absolute distance measurements at long range,” Nat. Photonics 3(6), 351–356 (2009). [Crossref] N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011). [Crossref] Y. Na, C.-G. Jeon, C. Ahn, M. Hyun, D. Kwon, J. Shin, and J. Kim, “Ultrafast, sub-nanometre-precision and multifunctional time-of-flight detection,” Nat. Photonics 14(6), 355–360 (2020). [Crossref] J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nat. Photonics 4(10), 716–720 (2010). [Crossref] Nat. Phys. (1) . R. J. Rengelink, Y. van der Werf, R. P. M. J. W. Notermans, R. Jannin, K. S. E. Eikema, M. D. Hoogerland, and W. Vassen, “Precision spectroscopy of helium in a magic wavelength optical dipole trap,” Nat. Phys. 14(11), 1132–1137 (2018). [Crossref] Nature (1) . T. Ideguchi, S. Holzner, B. Bernhardt, G. Guelachvili, N. Picqué, and T. W. H?nsch, “Coherent Raman spectro-imaging with laser frequency combs,” Nature 502(7471), 355–358 (2013). [Crossref] Opt. Commun. (2) . J. Park, J. Jin, J. W. Kim, and J.-A. Kim, “Measurement of thickness profile and refractive index variation of a silicon wafer using the optical comb of a femtosecond pulse laser,” Opt. Commun. 305, 170–174 (2013). [Crossref] M. Scheller, C. Jansen, and M. Koch, “Analyzing sub-100-?m samples with transmission terahertz time domain spectroscopy,” Opt. Commun. 282(7), 1304–1306 (2009). [Crossref] Opt. Express (6) . S. Kim, J. Na, M. J. Kim, and B. H. Lee, “Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics,” Opt. Express 16(8), 5516–5526 (2008). [Crossref] S. Maeng, J. Park, B. O, and J. Jin, “Uncertainty improvement of geometrical thickness and refractive index measurement of a silicon wafer using a femtosecond pulse laser,” Opt. Express 20(11), 12184–12190 (2012). [Crossref] H. J. Choi, H. H. Lim, H. S. Moon, T. B. Eom, J. J. Ju, and M. Cha, “Measurement of refractive index and thickness of transparent plate by dual-wavelength interference,” Opt. Express 18(9), 9429–9434 (2010). [Crossref] K. A. Sumihara, S. Okubo, K. Oguchi, M. Okano, H. Inaba, and S. Watanabe, “Polarization-sensitive dual-comb spectroscopy with an electro-optic modulator for determination of anisotropic optical responses of materials,” Opt. Express 27(24), 35141–35165 (2019). [Crossref] I. Pupeza, R. Wilk, and M. Koch, “Highly accurate optical material parameter determination with THz time-domain spectroscopy,” Opt. Express 15(7), 4335–4350 (2007). [Crossref] J. Roy, J.-D. Deschênes, S. Potvin, and J. Genest, “Continuous real-time correction and averaging for frequency comb interferometry,” Opt. Express 20(20), 21932–21939 (2012). [Crossref] Opt. Lett. (5) . A. Asahara, A. Nishiyama, S. Yoshida, K. Kondo, Y. Nakajima, and K. Minoshima, “Dual-comb spectroscopy for rapid characterization of complex optical properties of solids,” Opt. Lett. 41(21), 4971–4974 (2016). [Crossref] I. Coddington, W. C. Swann, and N. R. Newbury, “Coherent linear optical sampling at 15 bits of resolution,” Opt. Lett. 34(14), 2153–2155 (2009). [Crossref] M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23(12), 966–968 (1998). [Crossref] S. Schiller, “Spectrometry with frequency combs,” Opt. Lett. 27(9), 766–768 (2002). [Crossref] F. Keilmann, C. Gohle, and R. Holzwarth, “Time-domain mid-infrared frequency-comb spectrometer,” Opt. Lett. 29(13), 1542–1544 (2004). [Crossref] Optica (1) . I. Coddington, N. Newbury, and W. Swann, “Dual-comb spectroscopy,” Optica 3(4), 414–426 (2016). [Crossref] Phys. Rev. Lett. (1) . M. Niering, R. Holzwarth, J. Reichert, P. Pokasov, Th. Udem, M. Weitz, T. W. H?nsch, P. Lemonde, G. Santarelli, M. Abgrall, P. Laurent, C. Salomon, and A. Clairon, “Measurement of the hydrogen 1S-2S transition frequency by phase coherent comparison with a microwave cesium fountain clock,” Phys. Rev. Lett. 84(24), 5496–5499 (2000). [Crossref] Rev. Sci. Instrum. (1) . G. Jin, R. Jansson, and H. Arwin, “Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates,” Rev. Sci. Instrum. 67(8), 2930–2936 (1996). [Crossref] .
|
|
From：
|
|
|
系统抽取主题
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
|
(1)
|
(1)
|
|