1. Introduction . AlGaN-based deep ultraviolet (DUV) light-emitting diodes (LEDs) offer distinct advantages, including compact size, low power consumption, tunable wavelength, environmental friendliness, and extended lifespan. Their applications span various domains, encompassing disinfection, sterilization, biomedicine, and non-line-of-sight communication [ 1 ]. Presently, the maximum external quantum efficiency (EQE) for AlGaN-based DUV LEDs reaches 20% at an emission wavelength of 275 ...