Introduction . Microelectromechanical system (MEMS) pressure sensors, which are widely used in aerospace, biomedicine, industrial control and environmental monitoring, have the advantages of low power consumption, small size, low cost and small impact on measured objects1 , 2 , 3. However, high-pressure and high-accuracy pressure microsensors are urgently needed to meet the needs of high-pressure detection in harsh environments, such as downhole drilling and oil extraction, gas...